Surface planarization and masked ion-beam structuring of YBa₂Cu₃O₇ thin films

Author(s)

Johannes D. Pedarnig, Khurram Siraj, Marius Bodea, Ionut Puica, Wolfgang Lang, R. Kolarova, Peter Bauer, Klaus Haselgrübler, Christine Hasenfuss, Igor Beinik, Christian Teichert

Abstract

Surface planarization and masked ion-beam structuring (MIBS) of high-T_c superconducting (HTS) YBa₂Cu₃O_7-δ (YBCO) thin films grown by pulsed-laser deposition (PLD) method is reported. Chemical-mechanical polishing, plasma etching, and oxygen annealing of YBCO films strongly reduce the particulate density (~ 10^-2 x) and surface roughness (~ 10^-1 x) of as-grown PLD layers. The resistivity, critical temperature T-c approximate to 90 K and critical current density J_c (77 K)> 1 MA/cm² of films are not deteriorated by the planarization procedure. The YBCO films are modified and patterned by irradiation with He ions of 75 key energy. Superconducting tracks patterned by MIBS without removal of HIS material and, for comparison, by wet-chemical etching show same T_c and J_c(T) values. Different micro- and nano-patterns are produced in parallel on planarized films. The size of irradiated pattern depends on the mask employed for beam shaping and features smaller than 70 nm are achieved.

Organisation(s)

Electronic Properties of Materials

External organisation(s)

Johannes Kepler Universität Linz, Montanuniversität Leoben

Journal

Thin Solid Films

Volume

518

Pages

7075-7080

No. of pages

6

ISSN

0040-6090

DOI

https://doi.org/10.1016/j.tsf.2010.07.021

Publication date

2010

Peer reviewed

Yes

Austrian Fields of Science 2012

1030 Physics, Astronomy

Portal url

https://ucrisportal.univie.ac.at/en/publications/9367dd5e-6cb9-4e62-be89-77f1c294de14