Surface Damage Effects in Ultrasonic Cleaning of Silicon Wafers

Author(s)
A. Nadtochiy, Artem Podolian, Oleg Korotchenkov, D. Kalinichenko, Julian Schmid, Erika Kancsar, Viktor Schlosser
Organisation(s)
Electronic Properties of Materials
External organisation(s)
Taras Shevchenko National University of Kyiv (KNU)
Pages
416-419
No. of pages
3
Publication date
2011
Austrian Fields of Science 2012
Solid state physics
Portal url
https://ucris.univie.ac.at/portal/en/publications/surface-damage-effects-in-ultrasonic-cleaning-of-silicon-wafers(8ac54250-5f90-4267-9be0-0520ddb42b76).html