Surface Damage Effects in Ultrasonic Cleaning of Silicon Wafers
- Author(s)
- A. Nadtochiy, Artem Podolian, Oleg Korotchenkov, D. Kalinichenko, Julian Schmid, Erika Kancsar, Viktor Schlosser
- Organisation(s)
- Electronic Properties of Materials
- External organisation(s)
- Taras Shevchenko National University of Kyiv (KNU)
- Pages
- 416-419
- No. of pages
- 3
- Publication date
- 2011
- Austrian Fields of Science 2012
- 103009 Solid state physics
- Portal url
- https://ucris.univie.ac.at/portal/en/publications/surface-damage-effects-in-ultrasonic-cleaning-of-silicon-wafers(8ac54250-5f90-4267-9be0-0520ddb42b76).html