Nano-patterning of cuprate superconductors by masked He<sup>+</sup> ion irradiation:3-dimensional profiles of the local critical temperature

Author(s)
Kristijan Luka Mletschnig, Wolfgang Lang
Abstract

Irradiation of cuprate high-Tc superconductors with light ions of moderate energy creates point defects that lead to a reduction or full suppression of the critical temperature. By shaping the ion flux with a stencil mask, nanostructures for emerging superconducting electronics can be fabricated. The 3-dimensional shape of such defect landscapes is examined, based on calculations of full collision cascades and atom displacements. A relation between the calculated defect density and experimental values of the critical temperature in thin
YBa2Cu3O7−δ films is etablished that allows to determine the distribution of local Tc’s and its 3-dimensional visualization. The results confirm that, using 75 keV He+ ion irradiation and a stencil mask, well-defined patterns of non-superconducting material in the superconducting matrix can be produced with low blurring.

Organisation(s)
Electronic Properties of Materials
Journal
Microelectronic Engineering
Volume
215
No. of pages
6
ISSN
0167-9317
DOI
https://doi.org/10.1016/j.mee.2019.110982
Publication date
05-2019
Publication status
E-pub ahead of print
Peer reviewed
Yes
Austrian Fields of Science 2012
103033 Superconductivity, 210006 Nanotechnology
Keywords
Masked ion irradiation, Stencil mask, SRIM, Point defects, Superconductors
Portal url
https://ucris.univie.ac.at/portal/en/publications/nanopatterning-of-cuprate-superconductors-by-masked-he-ion-irradiation3dimensional-profiles-of-the-local-critical-temperature(79c19c20-4bb3-46d6-84e6-b32ad8645315).html